{"id":1702,"date":"2025-10-09T08:05:00","date_gmt":"2025-10-08T23:05:00","guid":{"rendered":"https:\/\/enemat.energy.nagoya-u.ac.jp\/?p=1702"},"modified":"2026-08-05T08:10:19","modified_gmt":"2026-08-04T23:10:19","slug":"jpn-j-appl-phys-7","status":"publish","type":"post","link":"https:\/\/enemat.energy.nagoya-u.ac.jp\/en\/2025\/10\/09\/1702\/","title":{"rendered":"Published: AlScN Thin Films by Scanning Combinatorial PLD"},"content":{"rendered":"\n<p class=\"wp-block-paragraph\">Our paper entitled \u201c<em>Scandium-doped Aluminum Nitride Thin Films by Scanning Combinatorial Pulsed Laser Deposition<\/em>\u201d has been published in <a href=\"http:\/\/dx.doi.org\/10.35848\/1347-4065\/ae0485\">Jpn. J. Appl. Phys.<\/a> We demonstrated the growth of highly-crystalized epitaxial AlScN thin films by using scanning combinatorial PLD.<\/p>\n\n\n\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"315\" height=\"266\" src=\"https:\/\/enemat.energy.nagoya-u.ac.jp\/wordpress\/wp-content\/uploads\/2026\/08\/20251009JJAP.png\" alt=\"\" class=\"wp-image-1700\" srcset=\"https:\/\/enemat.energy.nagoya-u.ac.jp\/wordpress\/wp-content\/uploads\/2026\/08\/20251009JJAP.png 315w, https:\/\/enemat.energy.nagoya-u.ac.jp\/wordpress\/wp-content\/uploads\/2026\/08\/20251009JJAP-300x253.png 300w\" sizes=\"auto, (max-width: 315px) 100vw, 315px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>Our paper entitled \u201cScandium-doped Aluminum Nitride Thin Films by Scanning Combinatorial Pulsed Laser Deposition\u201d has been published in Jpn. J. Appl. Phys. We demonstrated the growth of highly-crystalized epitaxial AlScN thin films by using scanning combinatorial PLD.<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"","sticky":false,"template":"","format":"standard","meta":{"_locale":"en_US","_original_post":"https:\/\/enemat.energy.nagoya-u.ac.jp\/?p=1699","footnotes":""},"categories":[1],"tags":[],"class_list":["post-1702","post","type-post","status-publish","format-standard","hentry","category-uncategorized","en-US"],"_links":{"self":[{"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/posts\/1702","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/comments?post=1702"}],"version-history":[{"count":2,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/posts\/1702\/revisions"}],"predecessor-version":[{"id":1705,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/posts\/1702\/revisions\/1705"}],"wp:attachment":[{"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/media?parent=1702"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/categories?post=1702"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/enemat.energy.nagoya-u.ac.jp\/wp-json\/wp\/v2\/tags?post=1702"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}